| 发明名称 |
ACCELERATION SENSOR |
| 摘要 |
An acceleration sensor includes a fixing portion, a weight portion, a detection beam, support beams, and a metal wiring. The weight portion is supported on the fixing portion so as to be freely displaced. The detection beam is connected to the fixing portion and the weight portion and piezoresistive elements are provided on the detection beam. The support beams are provided separately from the detection beam and are connected to the fixing portion and the weight portion. Both ends of the metal wiring are extended to the fixing portion and the metal wiring is wired so as to pass through the support beams. |
| 申请公布号 |
US2016069927(A1) |
申请公布日期 |
2016.03.10 |
| 申请号 |
US201514944454 |
申请日期 |
2015.11.18 |
| 申请人 |
Murata Manufacturing Co., Ltd. |
发明人 |
HAMAMURA Hiroshi |
| 分类号 |
G01P15/12 |
主分类号 |
G01P15/12 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A acceleration sensor comprising:
a fixing portion; a weight portion that is supported on the fixing portion so as to be freely displaced; a detection beam that is connected to the fixing portion and the weight portion and on which a piezoresistive element is provided; a support beam that is provided separately from the detection beam and is connected to the fixing portion and the weight portion; and a wiring portion, both ends of which are extended to the fixing portion, and that is wired so as to pass through the support beam. |
| 地址 |
Nagaokakyo-shi JP |
