PROBE TEST APPARATUS FOR FLAT PANNEL DISPLAY

摘要

The present invention relates to an electrical property test apparatus for a flat panel display having a vibration means for an improvement in the contact performance of a probe pin. The purpose of the present invention is to provide the electrical property test apparatus for flat panel display having vibration means for improvement in contact performance of a probe pin, which includes the vibration means added to a side of a probe card to which the probe pin is attached to measure a circuit state by applying an electrical signal to a circuit pattern of a glass fixed to an upper surface of a stage in a test process of a flat panel display product, and removes an oxide film of a contact surface through a physical vibration applied to the probe pin so that the probe pin and a pad surface can make an electrically smooth contact with each other. The electrical property test apparatus for a flat panel display having vibration means for improvement in contact performance of a probe pin comprises: a stage for placing the glass on a plate fixed at a point having a predetermined height; and a probe head provided with a probe card including the plurality of probe pins measuring the characteristics of a transistor while selectively contacting an electrode or a pad formed on the glass on an upper side thereof. The probe head is configured to be transferred on an X axis and a Y axis by a linear motor. The vibration means is provided at a predetermined point of the probe head, and includes a vibrator generating vibration having a specific waveform, frequency, and amplitude and transferring the generated vibration to end portions of the probe pins.