| 摘要 |
PROBLEM TO BE SOLVED: To provide a polycrystalline silicon reaction furnace in which the peeling off of polycrystalline silicon precipitated on the surface of an electrode holding a silicon core rod can be prevented.SOLUTION: Provided is a polycrystalline silicon reaction furnace where a silicon core rod 4 provided at the inside of the furnace is conductively heated, and a raw material gas fed into the furnace is reacted to produce polycrystalline silicon on the surface of the silicon core rod 4, the bottom plate part (furnace bottom) 2 of the furnace is provided with an electrode holder 10 provided in an electrically insulating state to the bottom plate part 2 and a core rod holding electrode 15 connected to the electrode holder 10 and holding the silicon core rod 4 toward the upper part, and the outer circumferential face of the core rod holding electrode 15 is provided with a recessed part (male screw part) 15b exposed to the furnace atmosphere.SELECTED DRAWING: Figure 2 |
