| 摘要 |
An optical scanning device (64) includes a substrate (68), which is etched to define an array (100) of two or more parallel micromirrors (102) and a support (72) surrounding the 5 micromirrors. Respective spindles (106) connect the micromirrors to the support, thereby defining respective parallel axes of rotation of the micromirrors relative to the support. One or more flexible coupling members (108) are connected to the micromirrors so as to synchronize an oscillation of the micromirrors about the .0 respective axes. |
