发明名称 SEMICONDUCTOR MEMORY DEVICE
摘要 According to one embodiment, the first columnar part includes a first channel body and a first charge storage film. The second columnar part includes a second channel body and a second charge storage film. The second columnar part is provided adjacent in the first direction to the first columnar part. The connection part connects a lower end of the first channel body and a lower end of the second channel body. Each of the source layers is connected to an upper end of the first columnar part. Each of the bit lines is connected to an upper end of the second columnar part of every (n+1)-th memory string of a plurality of memory strings arranged in the first direction.
申请公布号 US2016071866(A1) 申请公布日期 2016.03.10
申请号 US201514818603 申请日期 2015.08.05
申请人 Kabushiki Kaisha Toshiba 发明人 SHIMOJO Yoshiro;KIDOH Masaru;KITO Masaru;KATSUMATA Ryota;YANAI Yoshihiro
分类号 H01L27/115;H01L27/02 主分类号 H01L27/115
代理机构 代理人
主权项 1. A semiconductor memory device comprising: a multilayer body including a plurality of electrode layers stacked via an insulating layer; a plurality of memory strings arranged in a first direction and a second direction, the first direction being orthogonal to a stacking direction of the multilayer body, and the second direction being orthogonal to the stacking direction and the first direction; a plurality of source layers extending in the second direction on the memory string and separated in the first direction; and a plurality of bit lines extending in the first direction on the memory string and separated in the second direction, each of the memory strings including: a first columnar part including a first channel body extending in the stacking direction, and a first charge storage film provided between the first channel body and the electrode layers;a second columnar part including a second channel body extending in the stacking direction, and a second charge storage film provided between the second channel body and the electrode layer, the second columnar part being provided adjacent in the first direction to the first columnar part; anda connection part connecting a lower end of the first channel body and a lower end of the second channel body, each of the source layers being connected to an upper end of the first columnar part, and each of the bit lines being connected to an upper end of the second columnar part of every (n+1)-th memory string (n being an integer of 1 or more) of a plurality of memory strings arranged in the first direction.
地址 Minato-ku JP