| 发明名称 |
EFUSE STRUCTURE WITH STRESSED LAYER |
| 摘要 |
An electrically programmable fuse device includes an anode, a cathode, a fuse link connecting the anode and the cathode, a compressive stress layer on the anode, and a tensile stress layer on the cathode. Because of the compressive stress layer on the anode and a tensile stress layer on the cathode, the programming speed of the electrically programmable fuse device is shorter in relation to conventional electrically programmable fuse devices. |
| 申请公布号 |
US2016071797(A1) |
申请公布日期 |
2016.03.10 |
| 申请号 |
US201514822887 |
申请日期 |
2015.08.10 |
| 申请人 |
SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION |
发明人 |
GAN ZHENGHAO |
| 分类号 |
H01L23/525;H01L23/528;H01L23/532 |
主分类号 |
H01L23/525 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An electrically programmable fuse device comprising:
an anode; a cathode, a fuse link connecting the anode and the cathode; a compressive stress layer on the anode; and a tensile stress layer on the cathode. |
| 地址 |
Shanghai CN |
