ASSEMBLY OF LINER AND FLANGE FOR VERTICAL FURNACE AS WELL AS A VERTICAL PROCESS FURNACE

摘要

An assembly of a liner and a support flange for a vertical furnace for processing wafers, wherein the support flange is configured for supporting the liner, at least two support members that are connected to the cylindrical wall, each having a downwardly directed supporting surface, wherein each downwardly directed supporting surface is positioned radially outwardly from the inner cylindrical surface, wherein the support flange and/or the liner are configured such that, when the liner is placed on the support flange, the downwardly directed supporting surfaces are in contact with an upper surface of the support flange and support the liner, and wherein at least the part of the lower end surface of the liner that bounds the inner cylindrical surface is spaced apart from the upper surface of the support flange.

主权项

1. An assembly of a liner and a support flange for a vertical furnace for processing wafers, wherein the support flange is configured for supporting the liner, the support flange including:
a central inlet opening for inserting and removing a boat that is configured to carry wafers;the liner of the assembly including:
a cylindrical wall defining an inner cylindrical surface, an outer cylindrical surface and a lower end surface that delimits a liner inlet opening for inserting and removing a boat that is configured to carry wafers; a gas outlet opening adjacent an upper end of the liner; at least two support members that are connected to the cylindrical wall, each having a downwardly directed supporting surface, wherein each downwardly directed supporting surface is positioned radially outwardly from the inner cylindrical surface;wherein the support flange and/or the liner are configured such that, when the liner is placed on the support flange, the downwardly directed supporting surfaces are in contact with an upper surface of the support flange and support the liner, and wherein at least the part of the lower end surface of the liner that bounds the inner cylindrical surface is spaced vertically apart from the upper surface of the support flange.