| 发明名称 |
PNEUMATIC WAFER EXPANSION |
| 摘要 |
A die expansion tool and method for expanding foil of a foil carrier connected to a frame is disclosed. In the embodiment, the die expansion tool has an inner body within a cavity formed by an outer body. The frame of the foil carrier can be positioned within the outer body and a wafer attached to the foil of the foil carrier can be positioned over the inner body. A pressurized fluid system, also within the cavity of the outer body, is positioned such that the pressurized fluid system can move the frame axially around the inner body and expand the foil. |
| 申请公布号 |
US2016071748(A1) |
申请公布日期 |
2016.03.10 |
| 申请号 |
US201414478866 |
申请日期 |
2014.09.05 |
| 申请人 |
NXP B.V. |
发明人 |
Stokkermans Jozef Petrus Wilhelmus |
| 分类号 |
H01L21/67;H01L21/02 |
主分类号 |
H01L21/67 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A die expansion tool for expanding foil of a foil carrier to which a wafer is attached, the die expansion tool comprising:
an outer body, the outer body forming a cavity in which a frame of the foil carrier can be positioned; an inner body within the cavity of the outer body over which the wafer attached to the foil can be positioned; and a pressurized fluid system positioned within the cavity of the outer body and configured to move the frame axially around the inner body to expand the foil. |
| 地址 |
Eindhoven NL |
