SUBSTRATE CONVEYOR APPARATUS

摘要

The present invention relates to a substrate conveyor apparatus and particularly to a substrate conveyor apparatus capable of conveying flat substrates at regular intervals. The substrate conveyor apparatus according to the present invention comprises: a cassette having multiple substrates inserted and disposed therein; and a second conveyor member for conveying in one direction the substrates inserted and disposed in the cassette, wherein the second conveyor member comprises: a second belt having a caterpillar shape and conveying in one direction the substrates disposed on the upper side thereof; multiple stopper protrusions protruding from the upper side of the second belt and having spaces therebetween; and a second driving unit for rotating the second belt, and the relative movement of the substrates with respect to the second belt is stopped as the substrates supplied from the cassette to the second belt come into contact with the stopper protrusions.