FABRICATION METHOD FOR HEATING SUBSTRATE AND THE HEATING SUBSTRATE THEREBY

摘要

The present invention provides a manufacturing method of a heating substrate comprising the following steps: (1) forming a perfluorine polymer pattern of the upper side of a substrate; (2) spreading a nanomaterial including a carbon nano tube and an auxiliary material including at least one selected from a group composed of a conductive polymer, a carbon nanoplate, a metal nanowire, a metal particle, a ceramic particle, a graphene, and a grapheme oxide, on the substrate wherein the pattern is formed in the step (1); and (3) removing the perfluorine polymer pattern formed on the substrate of the step (2). When a nanomaterial pattern including the carbon nanotube is manufactured in a lift-off method, the manufacturing method of the heating substrate according to the present invention does not have a problem for a chemical reaction of a solvent used for spreading a nanomaterial such as a photoresist, the carbon nanotube, etc. due to using a perfluorine polymer, and can easily remove the perfluorine polymer pattern. Thus, the performance as the heating substrate is excellent since a pattern including the substrate and the carbon nanotube is not damaged.