发明名称 光学式位置測定装置
摘要 The device has a light source for emitting a radiation beam that is divided into two partial radiation beams by a dividing grid (41). The partial beams are reintegrated into a resulting radiation beam. A detection unit (40) produces displacement-dependent scanning signals from the resulting beam. A reflector is arranged in optical paths of the partial beams, where polarization effects of the reflector are changed periodically with polarization periods along movement degree of freedom of a measuring rod (20). The polarization periods are larger than dividing periods of the grid.
申请公布号 JP5882673(B2) 申请公布日期 2016.03.09
申请号 JP20110231342 申请日期 2011.10.21
申请人 ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツングDR. JOHANNES HEIDENHAIN GESELLSCHAFT MITBESCHRANKTER HAFTUNG 发明人 ヴォルフガング・ホルツアプフェル
分类号 G01D5/38 主分类号 G01D5/38
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