| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laser irradiation device that can suppress a cost increase in a cylindrical lens even if a beam cross-section becomes long. <P>SOLUTION: A plurality of laser emission surfaces are arranged in the X and Y directions which are orthogonal to each other, and emit laser beams in the Z direction. A first cylindrical lens is arranged correspondingly along the line of the laser emission surfaces arranged in the X direction. The first cylindrical lens makes the laser beams emitted from the laser emission surfaces into a parallel ray bundle in the YZ plane. The plurality of laser beams having transmitted through the first cylindrical lens go into a second cylindrical lens. The second cylindrical lens overlaps the plurality of laser beams on a long region which is long in the X direction. The second cylindrical lens includes a plurality of optical members arranged in the X direction. Each of the optical members includes a column surface comprised of bus lines parallel to the X direction and a mirror polished end surface vertical to the X direction. The end surfaces of optical members neighboring each other closely contact with each other. <P>COPYRIGHT: (C)2013,JPO&INPIT |
