发明名称 METHODS USING BLOCK COPOLYMER SELF-ASSEMBLY FOR SUB-LITHOGRAPHIC PATTERNING
摘要 Block copolymers can be self-assembled and used in methods as described herein for sub-lithographic patterning, for example. The block copolymers can be diblock copolymers, triblock copolymers, multiblock copolymers, or combinations thereof. Such methods can be useful for making devices that include, for example, sub-lithographic conductive lines.
申请公布号 EP2121514(B1) 申请公布日期 2016.03.09
申请号 EP20080728282 申请日期 2008.01.25
申请人 MICRON TECHNOLOGY, INC. 发明人 MILLWARD, DAN, B.
分类号 B81C1/00;G03F7/00;H01L21/027;H01L21/033;H01L21/308 主分类号 B81C1/00
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