发明名称 積層フィルム及びそれを用いた半導体製造用フィルム
摘要 The purpose of the present invention is to provide a laminate film which has excellent heat resistance and stress relaxing properties and is suitable as a component member for a film that is used for the production of a semiconductor. The present invention relates to a laminate film (10) having a laminated structure composed of at least two layers including the outermost layer (6), wherein the outermost layer (6) comprises a thermoplastic resin composition containing a thermoplastic resin having a melting point of 98°C or higher, at least one layer (a second layer (3)) other than the outermost layer (6) comprises a resin composition containing an ethylene-(unsaturated carboxylic acid) copolymer having an unsaturated carboxylic acid content of 17 mass% or more or an ionomer of the copolymer.
申请公布号 JP5882142(B2) 申请公布日期 2016.03.09
申请号 JP20120138848 申请日期 2012.06.20
申请人 三井・デュポンポリケミカル株式会社 发明人 青山 正貴;森本 厚司;一関 主税;廣中 芳孝
分类号 H01L21/304;C09J7/02;H01L21/301 主分类号 H01L21/304
代理机构 代理人
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