发明名称 ガスバリア性フィルム、ガスバリア性フィルムの製造方法及び電子デバイス
摘要 Provided is a gas barrier film including a base, a first barrier layer containing silicon which is formed on at least one surface of the base, and a second barrier layer containing silicon oxynitride which is formed on the first barrier layer. The water vapor transmission rate (g/m 2 /day) at 40°C and 90% RH in a structure in which the first barrier layer is formed on the base is R 1 and the water vapor transmission rate (g/m 2 /day) at 40°C and 90% RH in a structure in which the first barrier layer and the second barrier layer are laminated on the base is R 2 , and the ratio of the water vapor transmission rate R 1 to the water vapor transmission rate R 2 (R 1 /R 2 ) is 80 or more and 5000 or less. Hereby, excellent barrier performance can be exhibited under a high-temperature and high-humidity environment.
申请公布号 JP5880442(B2) 申请公布日期 2016.03.09
申请号 JP20120544321 申请日期 2011.11.18
申请人 コニカミノルタ株式会社 发明人 鈴木 一生
分类号 B32B9/00;B05D7/24;H01L51/50;H05B33/02;H05B33/04 主分类号 B32B9/00
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