| 摘要 |
PROBLEM TO BE SOLVED: To easily discharge a liquid material from the inside a raw material supply pipe when supplying the liquid material from a lower side to an upper side through the raw material supply pipe.SOLUTION: A liquid discharge mechanism 50 is provided adjacently to a vaporizer 11, an upper end of a raw material supply pipe 15 is connected to a bypass flow path 54 in a second raw material supply valve 74 of the liquid discharge mechanism 50, and respective valves 18 are disposed so as to supply an N2 gas and octane from the upper end side of the second raw material supply valve 74. Then, a different liquid discharge mechanism 50 is provided on the lower side of the raw material supply pipe 15, a supply pipe 14a extending from a raw material storage part 14 and a first raw material discharge pipe 61 for discharging the liquid material are connected to the liquid discharge mechanism 50, and in the case of discharging liquid inside the raw material supply pipe 15, the N2 gas and the octane are supplied from the upper side to the lower side to the inside of the raw material supply pipe 15. |
