发明名称 CAPACITIVE PRESSURE SENSOR
摘要 Provided is a capacitive pressure sensor that prevents not only a change in temperature but also electromagnetic noise in the air from affecting the measurement value of pressure. In the capacitive pressure sensor, an electrode member includes: a measurement electrode fixed to an insulating positioning member and having an electrode face; a signal extraction electrode fixed with an insulating seal sealing the other end of the body; and a flexible connection member for electrically connecting the measurement electrode and the signal electrode. Moreover, the flexible connection member is accommodated in the accommodating depressed portion formed in the measurement electrode or the signal extraction electrode.
申请公布号 EP2993454(A1) 申请公布日期 2016.03.09
申请号 EP20140863368 申请日期 2014.11.25
申请人 HORIBA STEC, CO., LTD. 发明人 KISHIDA, SOTARO;HATAITA, TAKEHISA;KUWAHARA, AKIRA
分类号 G01L9/12;G01L9/00;G01L19/00;G01L19/04 主分类号 G01L9/12
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