发明名称 METHOD FOR PRODUCING INDIUM OXIDE-CONTAINING LAYERS
摘要 The present invention relates to a fluid phase method for producing indium oxide-containing layers, in which a composition comprising at least one indium oxo-alkoxide of the generic formula MxOy(OR)z[O(R′O)eH]aXbYc[R″OH]d with x=3-25, y=1-10, z=3-50, a=0-25, b=0-20, c=1-20, d=0-25, e=0, 1, M=In, R, R′, R″=organic remainder, X═F, Cl, Br, I, and Y═—NO3, —NO2, where b+c is =1-20 and at least one solvent is applied to a substrate, optionally dried, and converted into an indium oxide-containing layer, to the indium oxo-alkoxides of the indicated generic formula, to coating compositions comprising said indium oxo-alkoxides, to layers that can be produced by means of the method according to the invention, and to the use of said layers.
申请公布号 EP2861782(B1) 申请公布日期 2016.03.09
申请号 EP20130726540 申请日期 2013.06.04
申请人 EVONIK DEGUSSA GMBH 发明人 STEIGER, JÜRGEN;FRÜHLING, DENNIS;MERKULOV, ALEXEY;HOPPE, ARNE
分类号 C23C18/12;C07F5/00;C23C18/14;H01L21/02;H01L21/18;H01L21/477;H01L29/24;H01L31/18 主分类号 C23C18/12
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