LARGE AREA MASTER WAFER, METHOD OF MANUFACTURING THE SAME, AND METHOD OF MANUFACTURING OF OPTICAL DEVICE

摘要

Disclosed are a large area master wafer, a method for manufacturing the large area master wafer and a method for manufacturing an optical device using the large area master wafer. The disclosed large area master wafer may include: a plurality of unit wafers where patterns are formed; at least one combining surface which is formed in the plurality of unit wafers; and a combining part for combining the plurality of unit wafers. The present invention can improve productivity of the large area optical device using the large area master wafer.