| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a surface defect inspection device capable of detecting defects, such as asperities and flaws, on a surface of an inspection object with high sensitivity. <P>SOLUTION: A surface defect inspection device 1 detects surface defects of an inspection object 5 by receiving reflection of light projected on the inspection object 5. The surface defect inspection device 1 includes: illumination means 2 having a plurality of point light sources 2a for emitting parallel light in order to project parallel light on the inspection object 5; moving means for relatively moving the illumination means 2 and the inspection object 5 so as to change a surface portion on which the parallel light is projected; imaging means 3 for receiving reflection from the surface portion of the inspection object 5, the reflection corresponding to the parallel light, in order to make the reflection a streak image; and detection means 4 for detecting defects on the surface of the inspection object on the basis of the streak image showing the imaged reflection. The point light sources 2a in the illumination means 2 are arrayed so that projected trajectories by the parallel light on a surface portion of the inspection object 5 becomes streaks in accordance with the relative movement. <P>COPYRIGHT: (C)2013,JPO&INPIT |
