发明名称 DEVICE AND METHOD FOR THE PRODUCTION OF A STAMP COMPRISING A NANOSTAMPING STRUCTURE
摘要 The stamper has a nano stamper structure for application of nano structures on components. A rigid support (7) is provided for the nano stamper structure, where the nano stamper structure is connected with the rigid support. The nano stamper structure has a hardened polymer such as elastomer e.g. siloxane e.g. poly-dimethyl siloxane (12). The rigid support is made up of ceramic e.g. sintered ceramic. Independent claims are also included for the following: (1) a device for production of the stamper (2) a method for production of the stamper.
申请公布号 EP1927028(B1) 申请公布日期 2016.03.09
申请号 EP20060777153 申请日期 2006.09.02
申请人 THALLNER, ERICH 发明人 THALLNER, ERICH
分类号 G03F7/00;B41D7/04 主分类号 G03F7/00
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