A method and apparatus for introducing a fluorine-containing flow stream to a deposition process to maintain process by-product volatility and reduce or eliminate by-product formation and/or interference.
申请公布号
EP1560252(B1)
申请公布日期
2016.03.09
申请号
EP20040258095
申请日期
2004.12.23
申请人
EDWARDS VACUUM, LLC
发明人
BAILEY, CHRISTOPHER MARK;HOGLE, RICHARD;PURDON, SIMON;KASMALKAR, REVATI PRADHAN;SULLIVAN, AARON;MA, CE;WANG, QING MIN
