| 摘要 |
The problem addressed by the present invention is to enable the reuse of a vacuum seal material of a standard CF flange, and for an operator to easily perform centering. The present invention is characterized by a seal member forming a vacuum seal with a standard CF flange (102), and the standard CF flange having: a knife edge (11) formed along a first circumference; and a groove (12) that is formed adjacent to the knife edge, formed along a second circumference that is concentric with the first circumference, and is formed outside of the first circumference. The present invention is further characterized by the seal member having: a protrusion (14) formed along a third circumference having a diameter that is smaller than the diameter of the second circumference; and a ring-shaped elastic body (15) that is disposed contacting the lateral surface of the protrusion and that is formed on the inside of the third circumference. The present invention is further characterized by forming a vacuum seal at the standard CF flange via the seal member by means of inserting the protrusion into the groove and crushing the ring-shaped elastic body with the knife edge. |
