发明名称 BONDING WIRE FOR USE WITH SEMICONDUCTOR DEVICES AND METHOD FOR MANUFACTURING SAID BONDING WIRE
摘要 Bonding wire for semiconductor device use where both leaning failures and spring failures are suppressed by (1) in a cross-section containing the wire center and parallel to the wire longitudinal direction (wire center cross-section), there are no crystal grains with a ratio a/b of a long axis "a" and a short axis "b" of 10 or more and with an area of 15 µm 2 or more ("fiber texture"), (2) when measuring a crystal direction in the wire longitudinal direction in the wire center cross-section, the ratio of crystal direction <100> with an angle difference with respect to the wire longitudinal direction of 15° or less is, by area ratio, 50% to 90%, and (3) when measuring a crystal direction in the wire longitudinal direction at the wire surface, the ratio of crystal direction <100> with an angle difference with respect to the wire longitudinal direction of 15° or less is, by area ratio, 50% to 90%. During the drawing steep, a drawing operation with a rate of reduction of area of 15.5% or more is performed at least once. The final heat treatment temperature and the pre-final heat treatment temperature are made predetermined ranges.
申请公布号 EP2993693(A1) 申请公布日期 2016.03.09
申请号 EP20150773517 申请日期 2015.03.31
申请人 NIPPON MICROMETAL CORPORATION;NIPPON STEEL & SUMIKIN MATERIALS CO., LTD. 发明人 YAMADA, TAKASHI;ODA, DAIZO;OISHI, RYO;HAIBARA, TERUO;UNO, TOMOHIRO
分类号 H01L21/60;B21C1/00;B23K35/02;B23K35/30;C22C5/06;C22C5/08;C22F1/00;C22F1/14;H01L23/00 主分类号 H01L21/60
代理机构 代理人
主权项
地址