| 摘要 |
A method of performing spectroscopy in a Transmission Charged-Particle Microscope comprising:
- A specimen holder, for holding a specimen;
- A source, for producing a beam of charged particles;
- An illuminator, for directing said beam so as to irradiate the specimen;
- An imaging system, for directing a flux of charged particles transmitted through the specimen onto a spectroscopic apparatus comprising a dispersing device for dispersing said flux into an energy-resolved array of spectral sub-beams,
which method comprises the following steps:
- Using an adjustable aperture device to admit a first portion of said array to a detector, while blocking a second portion of said array;
- Providing a radiation sensor in said flux upstream of said aperture device;
- Using said sensor to perform localized radiation sensing in a selected region of said second portion of the array, simultaneous with detection of said first portion by said detector;
- Using a sensing result from said sensor to adjust a detection result from said detector. |
