发明名称 |
SUBSTRATE HAVING INORGANIC SUBSTANCE GROWN THEREON AND FABRICATING METHOD FOR THE SAME |
摘要 |
The present invention relates to a substrate having an inorganic substance grown thereon and a manufacturing method thereof. More specifically, the substrate having an inorganic substance grown thereon comprises: a substrate having protruding structures separated from each other; an inorganic substance-containing rod grown at points where the protruding structures are formed; metal-containing nanoparticles formed on the inorganic substance-containing rod; and nano-gaps formed between the metal-containing nanoparticles. The present invention provides the substrate having an inorganic substance grown thereon which secures thermal stability and easily adjusts the nano-gaps. |
申请公布号 |
KR101601150(B1) |
申请公布日期 |
2016.03.09 |
申请号 |
KR20140129574 |
申请日期 |
2014.09.26 |
申请人 |
KOREA INSTITUTE OF MACHINERY & MATERIALS |
发明人 |
YUN, JUNG HEUM;PARK, SUNG GYU;KIM, DONG HO;MUN, CHAE WON |
分类号 |
C23C16/44;C23C14/32;C23C14/34 |
主分类号 |
C23C16/44 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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