发明名称 SUBSTRATE HAVING INORGANIC SUBSTANCE GROWN THEREON AND FABRICATING METHOD FOR THE SAME
摘要 The present invention relates to a substrate having an inorganic substance grown thereon and a manufacturing method thereof. More specifically, the substrate having an inorganic substance grown thereon comprises: a substrate having protruding structures separated from each other; an inorganic substance-containing rod grown at points where the protruding structures are formed; metal-containing nanoparticles formed on the inorganic substance-containing rod; and nano-gaps formed between the metal-containing nanoparticles. The present invention provides the substrate having an inorganic substance grown thereon which secures thermal stability and easily adjusts the nano-gaps.
申请公布号 KR101601150(B1) 申请公布日期 2016.03.09
申请号 KR20140129574 申请日期 2014.09.26
申请人 KOREA INSTITUTE OF MACHINERY & MATERIALS 发明人 YUN, JUNG HEUM;PARK, SUNG GYU;KIM, DONG HO;MUN, CHAE WON
分类号 C23C16/44;C23C14/32;C23C14/34 主分类号 C23C16/44
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