发明名称 TRANSFER EQUIPMENT FOR HEAVY OBJECT
摘要 The present invention relates to a transfer apparatus for a heavy object, for transferring the heavy object like a source supply apparatus in a deposition machine during a display manufacturing process. The transfer apparatus according to the present invention includes: a base; an installation plate which is installed at the center of the base; a driving arm which is installed on the installation plate, and has one side connected to the installation plate; and a driven arm which is installed in parallel adjacently to the driving arm, and has one side pivotally connected to the installation plate. A first link having one side pivotally connected to the driving arm is formed on an upper part of another side of the driving arm. A second link having one side pivotally connected to the driven arm is formed on an upper part of another side of the driven arm. The first link and the second link are installed in parallel with each other. A joint link connecting the first link and the second link is installed on an upper part of one side of the first link and the second link. A transfer board connecting the first link and the second link is installed on an upper part of another side of the first link and the second link. The transfer board is combined to an upper board of the transfer plate.
申请公布号 KR20160026124(A) 申请公布日期 2016.03.09
申请号 KR20140114058 申请日期 2014.08.29
申请人 TES CO., LTD. 发明人 CHOI, EUN JAE;PARK, JAE OK;JEE, CHANG HYUN
分类号 C23C16/44 主分类号 C23C16/44
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