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发明名称
シリコンエッチング方法
摘要
申请公布号
JP5878382(B2)
申请公布日期
2016.03.08
申请号
JP20120011687
申请日期
2012.01.24
申请人
株式会社アルバック;株式会社デンソー
发明人
森川 泰宏;大原 淳士;浅海 一志
分类号
H01L21/3065
主分类号
H01L21/3065
代理机构
代理人
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地址
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