Method for preparing monosilane using trialkoxysilane

摘要

Provided is a method for preparing monosilane, more particularly a method for economically preparing monosilane, which is useful for the composition of a thin semiconductor structure and multipurpose high-purity polycrystalline silicon, by preparing monosilane with high purity and high yield using trialkoxysilane.

主权项

1. A method for preparing monosilane, comprising:
(a) performing wet pulverization of silicon particles in a liquid-phase solvent until the silicon particles have a particle size of 30 μm to 100 μm; (b) continuously supplying a suspension, which comprises the pulverized silicon particles obtained in step (a) and the solvent, into a reactor, followed by synthesizing alkoxysilane of triethoxysilane and tetraethoxysilane through reaction of the pulverized silicon particles with anhydrous ethyl alcohol using a copper-based catalyst; and (c) synthesizing monosilane gas from the for obtained triethoxysilane using sodium ethoxide as a catalyst.