发明名称 半導体装置及びその製造方法
摘要 A semiconductor device has a semiconductor substrate including a body region, a drift region, a trench that extends from a surface of the semiconductor substrate into the drift region through the body region, and a source region located adjacent to the trench in a range exposed to the surface of the semiconductor substrate, the source region being isolated from the drift region by the body region. A specific layer is disposed on a bottom of the trench, and it has a characteristic of forming a depletion layer at a junction between the specific layer and the drift region. An insulating layer covers an upper surface of the specific layer and a sidewall of the trench. A conductive portion is formed on a part of the side wall of the trench. The conductive portion is joined to the specific layer, and reaches the surface of the semiconductor substrate.
申请公布号 JP5878331(B2) 申请公布日期 2016.03.08
申请号 JP20110229183 申请日期 2011.10.18
申请人 トヨタ自動車株式会社;株式会社デンソー 发明人 高谷 秀史;松木 英夫;鈴木 巨裕;石川 剛;副島 成雄;渡辺 行彦
分类号 H01L29/78;H01L21/336 主分类号 H01L29/78
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