| 摘要 |
Provided are: a silicon purification apparatus that uses a ring-shaped thermal-insulating lid, which can be replaced while heating a crucible, as a thermal-insulating means for keeping the surface of a silicon melt at a high temperature, and has a simple structure and is easy to produce, said silicon purification apparatus being capable of continuously processing several tens of portions of charged silicon with the crucible heated as is; a silicon purification method that makes use of the silicon purification apparatus; and a purification method. The present invention pertains to a silicon purification apparatus, which is provided with, inside a depressurization chamber equipped with a vacuum pump, a graphite crucible having an opening at the upper end and accommodating silicon therein, and a heating device for heating said crucible, said silicon purification apparatus being characterized by being provided with a ring-shaped thermal-insulating lid that covers the opening of the crucible at the top of the crucible and has an exhaust opening with an area smaller than the surface of the silicon melt inside the crucible, said thermal-insulating lid being capable of being replaced during heating of the crucible in the decompression chamber. The present invention further pertains to a silicon purification method that makes use of the silicon purification apparatus. |
