X-ray analysis apparatus with single crystal X-ray aperture and method for manufacturing a single crystal X-ray aperture

摘要

An X-ray analysis apparatus has at least one X-ray aperture (4; 4a, 4b) which delimits an X-ray beam (RS) emitted by an X-ray source (2). The at least one X-ray aperture (4; 4a, 4b) is disposed at a separation from the sample (5) and has a single crystal aperture body (8) with a through pinhole (9). The single crystal aperture body (8) forms a peripheral continuous edge (10) which delimits the X-ray beam (RS) and starting from which the pinhole (9) widens like a funnel in a direction of an outlet opening (11) of the X-ray aperture (4; 4a, 4b) in a first area (B1). The X-ray analysis apparatus reduces impairment of X-ray measurements due to parasitic scattered radiation and at little expense.

主权项

1. An X-ray analysis apparatus comprising:
an X-ray source from which an X-ray beam is emitted; at least one X-ray aperture which delimits said X-ray beam emitted by said X-ray source, said at least one X-ray aperture having a single crystal aperture body with a through pinhole, wherein said single crystal aperture body consists of one single piece of monocrystalline material, said single crystal aperture body forming a continuous circumferential edge which delimits said X-ray beam and starting from which said pinhole widens like a funnel in a direction of an outlet opening of said X-ray aperture in a first area thereof, wherein, at least in an area of said edge, a roughness depth of said X-ray aperture in one wavelength range between 10 nm and 1 μm is smaller than 100 nm; a sample position onto which the X-ray beam, which is delimited by said at least one X-ray aperture, is directed, wherein said at least one X-ray aperture, is disposed at a separation from said sample position; and an X-ray detector for detecting X-ray radiation emanating from said sample position.