| 发明名称 | Method and apparatus for recycling waste sulfuric acid | ||
| 摘要 | A method and an apparatus for recycling waste sulfuric acid solution are provided. The method includes providing a reaction tank and introducing a waste sulfuric acid (H2SO4) solution into the reaction tank, and the waste sulfuric acid solution includes hydrogen peroxide (H2O2). The method also includes supplying a compound containing chlorine into the reaction tank. The method further includes mixing the compound containing chlorine with the waste sulfuric acid solution to promote a chemical reaction that decomposes the hydrogen peroxide (H2O2). | ||
| 申请公布号 | US9278860(B2) | 申请公布日期 | 2016.03.08 |
| 申请号 | US201414338056 | 申请日期 | 2014.07.22 |
| 申请人 | Taiwan Semiconductor Manufacturing Co., Ltd. | 发明人 | Shiu Jin-Feng;Wang Rouh-Jier;Hsu Ching-Jung;Chen Wan-Yu;Hung Han-Ru |
| 分类号 | C01B17/69;C01B17/90;B01J14/00;B01J19/00;B01J19/24 | 主分类号 | C01B17/69 |
| 代理机构 | Birch, Stewart, Kolasch & Birch, LLP | 代理人 | Birch, Stewart, Kolasch & Birch, LLP |
| 主权项 | 1. A method for recycling waste sulfuric acid solution, comprising: providing a reaction tank; introducing a waste sulfuric acid (H2SO4) solution into the reaction tank, wherein the waste sulfuric acid solution comprises hydrogen peroxide (H2O2) and; supplying a compound containing chlorine into the reaction tank; mixing the compound containing chlorine with the waste sulfuric acid solution to promote a chemical reaction that decomposes the hydrogen peroxide (H2O2); and collecting a waste gas generated from the reaction tank after mixing the waste sulfuric acid solution and the compound containing chlorine, wherein the waste gas comprises Cl2 and O2. | ||
| 地址 | Hsin-Chu TW | ||