发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
摘要 Provided is a semiconductor device including a substrate and a stack layer. The substrate includes a first, a second, and a third region, wherein the third region is disposed between the first region and the second region. The substrate in the third region has a first step height since an upper end surface of the substrate in the first region is lower than that of the substrate in the second region. In addition, the stack layer is disposed on the substrate which is in the first and the third region, and the upper end surface of the stack layer in the first and the third region is practically the same plane as that of the substrate in the second region. According to the present invention, the semiconductor device can reduce the step height in a boundary region between a memory cell array region and a peripheral circuit region.
申请公布号 KR20160025428(A) 申请公布日期 2016.03.08
申请号 KR20140141025 申请日期 2014.10.17
申请人 MACRONIX INTERNATIONAL CO., LTD. 发明人 CHIN CHENG YANG
分类号 H01L21/306 主分类号 H01L21/306
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