Multi-resistivity Johnsen-Rahbek electrostatic clamp

摘要

A Johnsen-Rahbek (J-R) electrostatic clamp is provided for clamping a workpiece, wherein the J-R clamp has a dielectric layer having a clamping surface associated with the workpiece and a backside surface generally opposing the clamping surface. The dielectric layer has a plurality of regions, wherein each of the plurality of regions comprises one of a plurality of dielectric materials. Each of the plurality of dielectric materials has a baseline resistivity that is different from the remainder of the plurality of dielectric materials, and each of the plurality of regions of the dielectric layer has a baseline resistivity that is different from the remainder of the plurality of regions of the dielectric layer. A plurality of electrically conductive electrodes are associated with the backside surface of the dielectric layer, wherein each of the plurality of electrically conductive electrodes are associated with one or more of the plurality of regions of the dielectric layer.

主权项

1. A Johnsen-Rahbek (J-R) electrostatic clamp for clamping a workpiece, the electrostatic clamp comprising:
a dielectric layer having a clamping surface associated with the workpiece and a backside surface generally opposing the clamping surface, wherein the dielectric layer comprises a plurality of regions extending between the clamping surface and the backside surface, and wherein each of the plurality of regions comprises one of a plurality of dielectric materials, wherein each of the plurality of dielectric materials has a baseline resistivity that is different from the remainder of the plurality of dielectric materials, and wherein each of the plurality of regions of the dielectric layer has a baseline resistivity that is different from the remainder of the plurality of regions of the dielectric layer; and a plurality of electrically conductive electrodes associated with the backside surface of the dielectric layer, wherein each of the plurality of electrically conductive electrodes are associated with one or more of the plurality of regions of the dielectric layer.