Apparatus and method for terminating probe apparatus of semiconductor wafer

摘要

A probe apparatus and method of terminating a probe that probes a semiconductor device with a signal cable from a tester side by side at a proximal end of the probe and a distal end of the signal cable. In one embodiment, the probe apparatus includes: a chassis; a dielectric block mounted in the chassis for retaining the probe, the probe extending on the chassis from a proximal end of the probe to the dielectric block, extending through the dielectric block, and projecting from the dielectric block towards the semiconductor device at a distal end of the probe; and a terminating apparatus, mounted in the chassis, for terminating the proximal end of the probe with a distal end of the signal cable side by side.

主权项

1. A probe apparatus for probing a device on a semiconductor wafer, comprising:
a probe for probing a semiconductor device, the probe having a proximal end and a distal end, the probe comprising:
a probe conductor,a dielectric layer disposed around the probe conductor,a conductive coating layer covering and being disposed around the dielectric layer of the probe, anda conductive high temperature layer disposed around the conductive coating layer; a chassis; a dielectric block mounted in the chassis for retaining the probe, the probe extending from the proximal end of the probe towards the dielectric block, extending through the dielectric block, and projecting from the dielectric block towards the semiconductor device at the distal end of the probe; and a dielectric plate mounted on the chassis, the probe extending from the proximal end of the probe along the dielectric plate towards the dielectric block and the semiconductor device at the distal end of the probe, the probe being clamped onto the dielectric plate.