Gas sensor

摘要

A gas sensor comprises a layered structure with an ionic conductive film and a high gas-permeability interlayer film, a first catalyst electrode and a second catalyst electrode, a conductivity promotion structure, a high-k layer and a current detecting unit. The ionic conductive film includes a material with ionic conductivity ranging from 0.02 to 1000 S/cm. The first catalyst electrode and second catalyst electrode are located on the layered structure and spaced by a predetermined distance for ionizing a gas and reducing the ionized gas, respectively. The conductivity promotion structure includes a material with electronic conductivity ranging from 10−5 to 105 S/cm, and provides wanted electrons for a reduction reaction. The high-k layer is interposed between the conductivity promotion structure and layered structure. The current detecting unit is coupled to the first catalyst electrode and second catalyst electrode to sense a detecting current with respect to the ionized gas.

主权项

1. A gas sensor, comprising:
a layered structure comprising at least one ionic conductive film and at least one high gas-permeability interlayer film stacked in an alternative manner, wherein the thickness of the ionic conductive film is greater than or equivalent to that of the high gas-permeability interlayer film, the ionic conductive film is made of ionic material with its thickness in the range of 1 to 500 nanometers, and the ionic conductivity of the ionic conductive film is in the range of 0.02 to 1,000 S/cm; a first catalyst electrode and a second catalyst electrode disposed on the layered structure or at a lateral side of the layered structure with a gap therebetween, wherein a gas is ionized at the first catalyst electrode into gaseous ions, and the gaseous ions move to the second catalyst electrode via the high gas-permeability interlayer film of the layered structure such that the gaseous ions can be reduced by an reduction reaction at the second catalyst electrode; a conductivity promotion structure made of a material with electronic conductivity in the range of 10−5 to 105 S/cm to provide free electrons to enhance the reduction reaction; a high dielectric constant layer sandwiched between the layered structure and the conductivity promotion structure; and a detecting unit electrically connected to the first catalyst electrode and the second catalyst electrode.