发明名称 Multichannel thermocouple compensation for three dimensional temperature gradient
摘要 A method of using a thermocouple is provided. The method includes, but is not limited to, disposing at least one temperature sensor at each of two or more respective portions of an electrical connector adapted to receive thermocouple signals, measuring temperatures at the two or more portions, and calculating the temperatures at each terminal of the electrical connector based on measured temperature values of the two or more respective portions having the disposed temperature sensors. The method also includes, but is not limited to, calculating a cold junction temperature of a terminal for at least one thermocouple channel carrying the thermocouple signals based on measured or calculated temperature values of the terminals, or a combination thereof.
申请公布号 US9279731(B2) 申请公布日期 2016.03.08
申请号 US201313797091 申请日期 2013.03.12
申请人 Lam Research Corporation 发明人 Egley Fred Dennis;Distinti John;Norton Peter;Wang Andrea
分类号 G01K7/13;G01K1/02;G01K7/02 主分类号 G01K7/13
代理机构 Beyer Law Group LLP 代理人 Beyer Law Group LLP
主权项 1. A method of using a thermocouple, comprising: disposing at least one temperature sensor at each of two or more respective portions of an electrical connector that receives thermocouple signals; measuring temperatures at the two or more portions, wherein at least one portion is inside a housing and at least another portion is at least partially outside the housing; calculating the temperatures at each terminal of the electrical connector based on measured temperature values of the two or more respective portions having the disposed temperature sensors, wherein each of the temperature sensors is electrically connected to each terminal, wherein the electrical connector has more terminals than temperature sensors; and calculating a cold junction temperature of a terminal for at least one thermocouple channel carrying the thermocouple signals based on measured or calculated temperature values of the terminals, or a combination thereof.
地址 Fremont CA US