| 摘要 |
PROBLEM TO BE SOLVED: To easily obtain crystal orientation information of a sample interior.SOLUTION: An electron microscope comprises: an electron beam lens-barrel 1 for irradiating a sample 11 with an electron beam 1a; a sample stage 3 to support the sample 11; a scattered electron detector 6 for detecting backscattered electrons discharged from the sample 11; and a focused ion beam lens-barrel 2 for irradiating the sample 11 with a focused ion beam 2b. |
