DEVICE AND METHOD FOR CLEANING SURFACE OF MATERIAL

摘要

A device for cleaning the surface of a material, which removes contaminants including metal or a metal reactive material formed on the surface of a material to effectively remove contaminants stained on the surface of the material while preventing the thermal deformation of the material by minimizing thermal influence by a laser. The device for cleaning the surface of a material comprises a laser irradiation part which partially irradiates the surface of the material stained with the contaminants with an ultrashort pulse laser having at least picosecond, thereby cleaning the contaminants by applying peak energy having an ultrashort pulse to the surface of the material through the laser irradiated from the laser irradiation part.