Acceleration sensor structure and use thereof

摘要

A MEMS-sensor structure comprising first means and second means coupled for double differential detection and positioned symmetrically to provide quantities for the double differential detection in a phase shift. If the sensor deforms, due to a specifically symmetric positioning of the first and second means, the effect of the displacement is at least partly eliminated.

主权项

1. A sensor structure matrix comprising a first sensor cell, a second sensor cell and a third sensor cell, each of the sensor cells having a planar structure, the first sensor cell including a MEMS-sensor structure that comprises:
a first proof mass configured to pivot around an axis of rotation to provide a first differentially coupled pair of detectable quantities including a diminishing first quantity at a first location and an increasing second quantity at a second location mutually coupled so that said diminishing and increasing occur because of the same operation; and a second proof mass configured to pivot around the axis of rotation to provide a second differentially coupled pair of quantities including a diminishing third quantity at a third location and an increasing fourth quantity at a fourth location mutually coupled so that said diminishing and increasing occur because of the same operation, wherein the first proof mass and the second proof mass are coupled for double differential detection and positioned symmetrically to generate quantities for the double differential detection in a phase shift; wherein the first sensor cell, the second sensor cell and the third sensor cell are arranged into a common plane, wherein the second cell and the third sensor cell are arranged to detect acceleration components in the common plane, wherein the second sensor cell and the third sensor cell are arranged into parallel positions along a first direction in the common plane, wherein the first sensor cell is arranged to a parallel position between the second sensor cell and the third sensor cell in said common plane such that the axis of rotation of the first sensor cell is parallel to the first direction, wherein the first proof mass of the first cell includes an end part that extends beyond the dimension of the second sensor cell and the third sensor cell in a second direction, and to the outer ends of the second sensor cell and the third sensor cell in the first direction, wherein the second direction is perpendicular to the first direction, wherein the second proof mass of the first cell includes an end part that extends beyond the dimension of the second sensor cell and the third sensor cell in the second direction, and to the outer ends of the second sensor cell and the third sensor cell in the first direction, and wherein the end part of the first proof mass and the end part of the second proof mass are on different sides of the axis of rotation.