| 摘要 |
PROBLEM TO BE SOLVED: To provide a physical quantity sensor that has excellent detection sensitivity and to provide a pressure sensor, an altimeter, an electronic device, and a moving object that are provided with the physical quantity sensor.SOLUTION: A physical quantity sensor 1 includes a substrate 2 that includes a recessed portion 24 which is open on one face, a diaphragm portion 20 that includes a bottom portion of the recessed portion 24 and is flexibly deformed by receiving pressure, a piezoresistive element 5 that is arranged in the diaphragm portion 20, and a stepped portion 30 that is arranged along the periphery of the diaphragm portion 20 on the other face of the substrate 2 and protrudes from the diaphragm portion 20 in the thickness direction of the diaphragm portion 20 by a height h which is smaller than a depth d of the recessed portion 24.SELECTED DRAWING: Figure 1 |
