| 摘要 |
PROBLEM TO BE SOLVED: To provide a method capable of efficiently processing an object to be processed of high hardness composed of a single crystal sapphire, etc.SOLUTION: In a laser processing method for processing an object 1 to be processed which transmits a laser beam 2 used for laser processing with the laser beam 2, the laser beam 2 applied toward the object 1 to be processed is converged to a lower surface 6 of the object 1 to be processed in an optical axial direction Z, thereby, material of the object 1 to be processed is vaporized by generating multiphoton absorption on a focal position Fp of the laser beam 2, at the same time, the focal position Fp is moved toward the upper surface 5 from the lower surface 6 of the object 1 to be processed in the optical axial direction Z of the laser beam 2 and, thereby, a penetration part 7 is formed on the object 1 to be processed.SELECTED DRAWING: Figure 1 |
