SEPARATION METHOD, LIGHT-EMITTING DEVICE, MODULE, AND ELECTRONIC DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a separation method improved in yield, and a light-emitting device with high light extraction efficiency.SOLUTION: A separation method includes: a first step of forming a separation layer 102 over a substrate 101; a second step of subjecting a surface of the separation layer to plasma treatment; a third step of forming a layer 110 to be separated over the separation layer; a fourth step of heating the separation layer and the layer to be separated; and a fifth step of separating the separation layer from the layer to be separated. In the separation method, the plasma treatment is performed under an atmosphere containing nitrous oxide and silane.SELECTED DRAWING: Figure 1