| 摘要 |
PROBLEM TO BE SOLVED: To provide a drive mechanism of a mirror in a vacuum vessel capable of eliminating the need for operation of releasing and fastening of a large number of pairs of bolts and nuts, facilitating the positioning and the adjustment of the mirror, and at the same time, preventing a spot diameter of a beam from varying.SOLUTION: A mirror part 100 having a mirror 101 is supported at a movable body 110 pivotally around a first axis Z, thus the mirror part 100 is made rotatable in a vertical direction. The movable body 110 is supported at a second support body 120 pivotally around a second axis Z, thus the mirror part 100 is made rotatable in a horizontal direction. Additionally, there is provided a spring 103 for energizing the mirror part 100 in a clockwise direction of rotation around the first axis Z. Shafts 132 of operation screw parts 131 are brought in contact with the mirror part so as to press the mirror part in a counterclockwise direction of rotation around the first axis Z, and the shafts 132 are provided at two places across the second axis Zof the mirror part 100. Positioning of vertical and horizontal rotation of the mirror part 100 is performed by adjusting the amount of advancing and retracting of the shafts 132.SELECTED DRAWING: Figure 2 |
