COOLING APPARATUS AND MULTI-CHAMBER HEAT TREATMENT APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a flow capable of cooling an object to be treated efficiently and uniformly to a cooling chamber, in a cooling apparatus and a multi-chamber heat treatment apparatus for cooling the object by immersing in a cooling liquid in the cooling chamber.SOLUTION: A cooling apparatus cools an object X to be treated by immersing in a cooling liquid W and includes a cooling chamber 1 which contains the object X and is capable of storing the cooling liquid W inside, a supply nozzle 2 which supplies the cooling liquid W from the below of the object X to the cooling chamber 1, recovery piping 7 which recovers the cooling liquid W stored in the cooling chamber 1 from the above of the object X and a pump 4 which pressure-feeds the cooling liquid W recovered through the recovery piping 7 to the supply nozzle 2.SELECTED DRAWING: Figure 4