| 摘要 |
PROBLEM TO BE SOLVED: To provide a fluid supply device capable of shortening a replacement time by improving the replaceability of auxiliary flow channels which are provided in a direction perpendicular to a main flow channel.SOLUTION: A fluid supply device 1 has a linear main flow channel 12 and auxiliary flow channels 13B-13D extending in a direction perpendicular to the main flow channel 12, in which viscous fluid flows in the main flow channel 12 from the upstream side of the auxiliary flow channels 13B-13D to the downstream side. The fluid supply device has chamfered portions 31B-31D formed by chamfering portions of corner parts 9B-D at which the inner wall 15 of the main flow channel 12 intersects with the inner walls 14B-14D of the auxiliary flow channels 13B-13D and which lie on the upstream side of the main flow channel 12. At portions of the corner parts 9B-9D lying on the downstream side, the inner wall 15 is intersected with the inner walls 14B-14D at right angles. A replacement fluid input control valve 2A is provided on the upstream side of the main flow channel 12.SELECTED DRAWING: Figure 1 |
