MODULAR DESIGN SYSTEM OF A SEMICONDUCTOR FAB UTILITIES

摘要

The present invention relates to a design system for modularizing a semiconductor fab utility. More specifically, the design system for modularizing a semiconductor fab utility: minimizes a construction period delay risk caused by a design change by flexibly managing a frequent apparatus change; performs efficient construction by reducing construction human resources and construction hours through the modularity of a semiconductor fab utility or the like; and remarkably curtails the construction period by primarily performing advance plumbing work through a semiconductor fab utility module to minimize lifting work of plumbing and a field plumbing welding process during the construction. According to the present invention, input manpower for lifting management can be reduced; a uniform quality can be secured; and an initial investment cost reduction effect can be anticipated.