| 摘要 |
PROBLEM TO BE SOLVED: To provide a band lineup device capable of measuring the Fermi level, in addition to the valence band upper limit (E) and the conduction band lower limit(E), and to allow for measurement even of a sample having an arbitrary or unknown dielectric constant, when measuring the Fermi level by using a Kelvin probe.SOLUTION: Bandgaps Eand Eare determined by reflection, transmission and absorption measurement of light using ionization potential measurement and a spectrophotometer. Furthermore, a Kelvin probe (shown on the drawing), an optical fiber passing the irradiation light for these measurement penetrates the center of which, is installed directly above a sample so as to measure the contact potential difference from the metal of the probe, and then the Fermi level is determined therefrom. In the contact potential difference measurement, a gradient tracking method is improved so that a sample of unknown dielectric constant can be coped with.SELECTED DRAWING: Figure 7 |
