DEFECT EXTRACTION DEVICE AND DEFECT EXTRACTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a defect extraction device and a defect extraction method capable of precisely estimating a position.SOLUTION: A defect extraction device (1) comprises a convergence evaluation unit (115) which is configured so that: a Nelder Mead method is used to create a first provisional joint conversion parameter (P) to measurement points and reference points; the measurement points are moved using the first provisional joint conversion parameter; among the moved measurement points, the measurement points having larger distance than a threshold value (R) are extracted; then, the Nelder Mead method is used to create a second provisional joint conversion parameter (Pans) to the measurement points included therein and corresponding reference points; the measurement points are moved using the first and second provisional joint conversion parameters; first and second average values related to distance between the moved measurement points and corresponding reference points are respectively calculated; these average values are compared; and the smaller value out of them is employed to a final provisional joint conversion parameter.SELECTED DRAWING: Figure 1